17 8 Automatic Virtual Metrology (AVM) 8.1 Introduction 8.2 Evolution of VM and Invention of AVM 8.3 Integrating AVM Functions into the Manufacturing Execution System (MES) 8.4 Applying AVM for Workpiece‐to‐Workpiece (W2W) Control 8.5 AVM System Deployment 8.6 Conclusion Appendix 8.A – Abbreviation List Appendix 8.B – List of Symbols in Equations Appendix 8.C – Patents (AVM) References
18 9 Intelligent Predictive Maintenance (IPM) 9.1 Introduction 9.2 BPM 9.3 Time‐Series‐Prediction (TSP) Algorithm for Calculating RUL 9.4 Factory‐Wide IPM Management Framework 9.5 IPM System Implementation Architecture 9.6 IPM System Deployment 9.7 Conclusion Appendix 9.A ‐ Abbreviation List Appendix 9.B – List of Symbols in Equations Appendix 9.C – Patents (IPM) References
19 10 Intelligent Yield Management (IYM) 10.1 Introduction 10.2 KSA Scheme 10.3 IYM System Deployment 10.4 Conclusion Appendix 10.A ‐ Abbreviation List Appendix 10.B ‐ List of Symbols in Equations Appendix 10.C ‐ Patents (IYM) References
20 11 Application Cases of Intelligent Manufacturing 11.1 Introduction 11.2 Application Case I: Thin Film Transistor Liquid Crystal Display (TFT‐LCD) Industry 11.3 Application Case II: Solar Cell Industry 11.4 Application Case III: Semiconductor Industry 11.5 Application Case IV: Automotive Industry 11.6 Application Case V: Aerospace Industry 11.7 Application Case VI: Chemical Industry 11.8 Application Case VII: Bottle Industry Appendix 11.A ‐ Abbreviation List Appendix 11.B ‐ List of Symbols in Equations References
21 Index
List of Tables
1 Chapter 2Table 2.1 Sensor comparison.Table 2.2 Illustrative example of applying M codes to segment the “X44Y50” ...Table 2.3 Definition of time‐domain SFs.Table 2.4 Tool diagnosis example: results of using an RF model.
2 Chapter 3Table 3.1 Handshake codes (bytes).Table 3.2 Header composition.Table 3.3 Timeout parameters (in seconds).Table 3.4 Streams.Table 3.5 Item header.Table 3.6 Item format codes.Table 3.7 SECS notations.Table 3.8 HSMS timeouts.Table 3.9 HSMS‐SS configuration.Table 3.10 Comparison of HSMS and SECS‐I.Table 3.11 Required parameter list of Coater.
3 Chapter 5Table 5.1 Some distinctions between Docker containers and virtual machines.
4 Chapter 7Table 7.1 Time analysis of deploying two PAMC’s into a CPAC.Table 7.2 Query times using four types of data format in experiments 1 and ...Table 7.3 Comparisons of execution times in processing different sizes of d...Table 7.4 Annotated keywords‐SI tags lookup table.Table 7.5 Comparisons of development times of Novice, Skilled Professional,...
5 Chapter 8Table 8.1 Simulation‐parameter definitions and setting values.Table 8.2 Cpk values of 5‐cases APC methods (α1 = 0.35).Table 8.3 MAPEP values of 5‐cases APC methods (α1 = 0.35, Unit: %)....Table 8.4 Simulation parameters and setting values (Normal and Weibull dist...Table 8.5 MAPEP values of 5‐Cases APC methods for A. Normal with RI; B. Wei...
6 Chapter