Optical Engineering Science. Stephen Rolt. Читать онлайн. Newlib. NEWLIB.NET

Автор: Stephen Rolt
Издательство: John Wiley & Sons Limited
Серия:
Жанр произведения: Отраслевые издания
Год издания: 0
isbn: 9781119302810
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aberrations on pupil function, p, and field angle, θ.

       Spherical Aberration: ΦSA ∝ p4

       Coma: ΦCO ∝ p3θ

       Field Curvature: ΦFC ∝ p2θ2

       Astigmatism: ΦAS ∝ p2θ2

       Distortion: ΦDI ∝ pθ3

      To quantify each aberration, we can define a coefficient, K, which describes the magnitude (in units of length) of the aberration. In addition, as well as normalising the pupil function, we can also normalise the field angle by introducing the quantity, h, which represents the ratio, θ/θ0, the ratio of the field angle to the maximum field angle.

      (3.37)equation

      (3.38)equation

      (3.39)equation

      (3.41)equation

      (3.42)equation

      (3.43)equation

      3.6.2 Transverse Aberration Dependence

      The ray fan or transverse aberration dependence upon pupil function and field angle is such that the order of the two variables sum to three, as opposed to four for OPD. The dependence of transverse aberration is listed below:

       Spherical Aberration: tSA ∝ p3

       Coma: tCO ∝ p2θ

       Field Curvature: tFC ∝ pθ2

       Astigmatism: tAS ∝ pθ2

       Distortion: ΦAS ∝ θ3

      3.6.3 General Representation of Aberration and Seidel Coefficients

      p is the pupil function and h is the object height (proportional to field angle θ); φ is the ray fan angle.

      It should be noted that this convention incorporates powers of cosφ, so the astigmatism term contains some average field curvature. Describing each of the aberration coefficients introduced earlier in terms of these coefficients gives the following:

      (3.46)equation

      (3.47)equation

      (3.49)equation

      (3.50)equation

      Another convention exists of which the reader should be aware. These are the so called Seidel coefficients, named after the nineteenth century mathematician, Phillip Ludwig von Seidel, who first elucidated the five monochromatic aberrations. The coefficients are usually denominated, SI, SII, SIII, SIV, and SV, referring to spherical aberration, coma, astigmatism, field curvature, and distortion. They nominally quantify the WFE, as the other coefficients do, but their magnitude is determined by the size of the blur spot that the aberration creates. The correspondence of these terms is as follows:

      (3.51)equation

      (3.52)equation

      (3.53)equation

      (3.55)equation

      The