Microsystem Technology - Wolfgang Menz
| Автор: | Wolfgang Menz |
| Издательство: | John Wiley & Sons Limited |
| Серия: | |
| Жанр произведения: | Техническая литература |
| Год издания: | 0 |
| isbn: | 9783527613014 |
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.