Measurement Technology for Micro-Nanometer Devices - Zongmin Ma
| Автор: | Zongmin Ma |
| Издательство: | John Wiley & Sons Limited |
| Серия: | |
| Жанр произведения: | Техническая литература |
| Год издания: | 0 |
| isbn: | 9781118717981 |
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices