Lithography - Stefan Landis
| Автор: | Stefan Landis |
| Издательство: | John Wiley & Sons Limited |
| Серия: | |
| Жанр произведения: | Техническая литература |
| Год издания: | 0 |
| isbn: | 9781118621233 |
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.