Silicon Technologies. Ion Implantation and Thermal Treatment - Annie Baudrant
| Автор: | Annie Baudrant |
| Издательство: | John Wiley & Sons Limited |
| Серия: | |
| Жанр произведения: | Техническая литература |
| Год издания: | 0 |
| isbn: | 9781118601112 |
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.